Class: ALD
_Atomic Layer Deposition (ALD) is a thin-film deposition technique that enables precise control over film thickness at the atomic level. This method is highly valued for its ability to deposit ultra-thin, conformal films with excellent uniformity, even on complex 3D surfaces. _
classDiagram
class ALD
click ALD href "../ALD"
SynthesisProcess <|-- ALD
click SynthesisProcess href "../SynthesisProcess"
ALD <|-- ALDBeneQ
click ALDBeneQ href "../ALDBeneQ"
ALD : id
ALD : iri
ALD : name
Inheritance
Slots
Name | Cardinality and Range | Description | Inheritance |
---|---|---|---|
name | 0..1 String |
A human-readable name for a thing | Entity, NamedEntity |
id | 1 Uriorcurie |
A unique identifier for a thing | Entity |
iri | 0..1 String |
Internationalized Resource Identifier | Entity |
Identifier and Mapping Information
Schema Source
- from schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
Mappings
Mapping Type | Mapped Value |
---|---|
self | hzb_metadata_schema:ALD |
native | hzb_metadata_schema:ALD |
LinkML Source
Direct
name: ALD
description: 'Atomic Layer Deposition (ALD) is a thin-film deposition technique that
enables precise control over film thickness at the atomic level. This method is
highly valued for its ability to deposit ultra-thin, conformal films with excellent
uniformity, even on complex 3D surfaces. '
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
is_a: SynthesisProcess
Induced
name: ALD
description: 'Atomic Layer Deposition (ALD) is a thin-film deposition technique that
enables precise control over film thickness at the atomic level. This method is
highly valued for its ability to deposit ultra-thin, conformal films with excellent
uniformity, even on complex 3D surfaces. '
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
is_a: SynthesisProcess
attributes:
name:
name: name
description: A human-readable name for a thing
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
slot_uri: schema:name
alias: name
owner: ALD
domain_of:
- Entity
- NamedEntity
range: string
id:
name: id
description: A unique identifier for a thing
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
slot_uri: schema:identifier
identifier: true
alias: id
owner: ALD
domain_of:
- Entity
range: uriorcurie
required: true
iri:
name: iri
description: Internationalized Resource Identifier
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
alias: iri
owner: ALD
domain_of:
- Entity
range: string