Class: SputteringVonAdenne
_Physical vapor deposition (PVD) technique used to deposit thin films onto a substrate, particularly with the von Adenne (PC3 chamber) machine. _
URI: hzb_metadata_schema:SputteringVonAdenne
classDiagram
class SputteringVonAdenne
click SputteringVonAdenne href "../SputteringVonAdenne"
Sputtering <|-- SputteringVonAdenne
click Sputtering href "../Sputtering"
SputteringVonAdenne : id
SputteringVonAdenne : iri
SputteringVonAdenne : name
Inheritance
- Entity
- NamedEntity
- Process
- SynthesisProcess
- Sputtering
- SputteringVonAdenne
- Sputtering
- SynthesisProcess
- Process
- NamedEntity
Slots
Name | Cardinality and Range | Description | Inheritance |
---|---|---|---|
name | 0..1 String |
A human-readable name for a thing | Entity, NamedEntity |
id | 1 Uriorcurie |
A unique identifier for a thing | Entity |
iri | 0..1 String |
Internationalized Resource Identifier | Entity |
Identifier and Mapping Information
Schema Source
- from schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
Mappings
Mapping Type | Mapped Value |
---|---|
self | hzb_metadata_schema:SputteringVonAdenne |
native | hzb_metadata_schema:SputteringVonAdenne |
LinkML Source
Direct
name: sputtering_vonAdenne
description: 'Physical vapor deposition (PVD) technique used to deposit thin films
onto a substrate, particularly with the von Adenne (PC3 chamber) machine. '
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
is_a: Sputtering
Induced
name: sputtering_vonAdenne
description: 'Physical vapor deposition (PVD) technique used to deposit thin films
onto a substrate, particularly with the von Adenne (PC3 chamber) machine. '
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
is_a: Sputtering
attributes:
name:
name: name
description: A human-readable name for a thing
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
slot_uri: schema:name
alias: name
owner: sputtering_vonAdenne
domain_of:
- Entity
- NamedEntity
range: string
id:
name: id
description: A unique identifier for a thing
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
slot_uri: schema:identifier
identifier: true
alias: id
owner: sputtering_vonAdenne
domain_of:
- Entity
range: uriorcurie
required: true
iri:
name: iri
description: Internationalized Resource Identifier
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
alias: iri
owner: sputtering_vonAdenne
domain_of:
- Entity
range: string