Slot: rotation
Angular velocity at which the target material (or in some cases, the substrate) is rotated during the sputtering process.
URI: hzb_metadata_schema:rotation
Applicable Classes
| Name | Description | Modifies Slot |
|---|---|---|
| SputteringPrevac | Physical vapor deposition (PVD) technique used to deposit thin films onto a s... | no |
Properties
- Range: Float
Identifier and Mapping Information
Schema Source
- from schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
Mappings
| Mapping Type | Mapped Value |
|---|---|
| self | hzb_metadata_schema:rotation |
| native | hzb_metadata_schema:rotation |
LinkML Source
name: rotation
description: Angular velocity at which the target material (or in some cases, the
substrate) is rotated during the sputtering process.
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
alias: rotation
owner: Sputtering_prevac
domain_of:
- Sputtering_prevac
range: float