Slot: target
Target is the material that gets bombarded by ions and subsequently ejected (sputtered) onto a substrate to form a thin film. (e.g. Al, Ti, Pt, etc).
URI: hzb_metadata_schema:target
Applicable Classes
| Name | Description | Modifies Slot |
|---|---|---|
| SputteringPrevac | Physical vapor deposition (PVD) technique used to deposit thin films onto a s... | no |
Properties
- Range: String
Identifier and Mapping Information
Schema Source
- from schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
Mappings
| Mapping Type | Mapped Value |
|---|---|
| self | hzb_metadata_schema:target |
| native | hzb_metadata_schema:target |
LinkML Source
name: target
description: Target is the material that gets bombarded by ions and subsequently ejected
(sputtered) onto a substrate to form a thin film. (e.g. Al, Ti, Pt, etc).
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
alias: target
owner: Sputtering_prevac
domain_of:
- Sputtering_prevac
range: string