Slot: z_position
Vertical position of the substrate or the target material in the sputtering chamber.
URI: hzb_metadata_schema:z_position
Applicable Classes
| Name | Description | Modifies Slot |
|---|---|---|
| SputteringPrevac | Physical vapor deposition (PVD) technique used to deposit thin films onto a s... | no |
Properties
- Range: Float
Identifier and Mapping Information
Schema Source
- from schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
Mappings
| Mapping Type | Mapped Value |
|---|---|
| self | hzb_metadata_schema:z_position |
| native | hzb_metadata_schema:z_position |
LinkML Source
name: z_position
description: Vertical position of the substrate or the target material in the sputtering
chamber.
from_schema: https://w3id.org/https://github.com/HZB-CE-DataSchemas//hzb-catalysisLabs-schema
rank: 1000
alias: z_position
owner: Sputtering_prevac
domain_of:
- Sputtering_prevac
range: float